Micro-Analysis regarding Air Quality

In the current semiconductor industry, a wide range of chemicals, including IPA for drying and HMDS for wafer processing, are employed in various situations. These chemicals, along with volatile gases and acidic/alkaline gases present in the atmosphere, are considered to be contributing factors to process defects.

At International Green Technology, we have developed highly sensitive analysis equipment to measure gas concentrations in the air environment.
Our goal is to propose the optimal filter solution tailored to your specific environment.

Our equipment

Liquid chromatograph

GC-MS instrument

ICP-MS instrument

Measurable parameters

Situation	In a clean room environment, atmospheric conditions, upstream/downstream of chemical filters.
Target	Condensable, VOCs (Toluene, Siloxanes, etc.) Acids (F-, Cl-, NO2-, Br-, NO3-, PO43-, SO42-) Bases (Li+, Na+, NH4+, K+, Ca2+, Mg2+) Metals (Al, B, Ca, Cd, Cr, Cu, Fe, Mg, Mn, Na, Pb, Zn, Ni)
Method	After collecting the gas using a TENAX adsorption tube, qualitative and quantitative analysis is performed using a gas chromatograph mass spectrometer. After collecting the gas using an impinger, simplified qualitative and quantitative analysis is performed using an ion chromatograph. After collecting the gas using an impinger, qualitative and quantitative analysis is performed using an inductively coupled plasma mass spectrometer.

Please feel free to contact us for measurement requests, inquiries, etc.