Sola Ciel Tray
Sola Ciel Tray is a chemical filter filled with the high-performance activated carbon used in Sola Ciel Pleat and Sola Ciel Mat. It excels at removing organic gases and acidic gases by impregnating them with chemicals. It is used as an outside air intake filter in electronic equipment manufacturing plants.
・ Filter filled with activated carbon media
・ Specifications suitable for outdoor air conditioners
・ Low pressure loss; can handle organic and acidic gases
・ Tray-mounted type for easy replacement
Tools
MAU
Frame Material
Stainless steel
Sizing in mm
610ｘ610ｘ610D
610ｘ305ｘ610D
Custom Sizing Possible
Compatible Gasses
| Gaz | Material | Problem |
| Condensable Volatiles |
TMS, IPA, PGMEA, TOLUENE, N-DECANE, HMDS | Contamination of wafers Contamination of lenses |
| Acids | SO2, H3PO4, CH3COOH | Corrosion of metal wiring Contamination of wafers Contamination of lenses |
| Bases Amine |
NH3, NMP, TMA, Morpholine | Contamination of wafers Contamination of lenses |