Sola Ciel Pleat

 

Sola Ciel Pleat is a chemical filtration filter made of pleated filter material, which is made of an adsorbent such as activated carbon sandwiched between nonwoven fabric.

It excels at removing low-concentration, low-boiling-point compounds and is used in semiconductor manufacturing equipment, which requires a high level of cleanliness.

・Pleated media filter

・Can be installed in semiconductor and electronic device manufacturing equipment

・Can handle low-concentration organic gases, acidic gases, and basic gases

・Special structure with high loading of activated carbon and ion exchanger between sheets

Tools：FFU

Frame material：Stainless steel

Sizing in mm：　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　　610ｘ610ｘ80D,100D,147D　610ｘ900ｘ80D,100D,147D　305ｘ610ｘ80D,100D,147D　　　　　　　　400ｘ610ｘ80D,100D,147D　250ｘ450ｘ80D,100D,147D　Custom Sizing Possible

Compatible Gasses

GazMaterialProblem
Condensable
Volatiles		TMS, IPA, PGMEA, TOLUENE, N-DECANE, HMDS,HMDSOContamination of wafers
Contamination of lenses
AcidsSO2, H3PO4, CH3COOHCorrosion of metal wiring
Contamination of wafers
Contamination of lenses
Bases
Amine		NH3, NMP, TMA, MorpholineContamination of wafers
Contamination of lenses