Sola Ciel Pleat
Sola Ciel Pleat is a chemical filtration filter made of pleated filter material, which is made of an adsorbent such as activated carbon sandwiched between nonwoven fabric.
It excels at removing low-concentration, low-boiling-point compounds and is used in semiconductor manufacturing equipment, which requires a high level of cleanliness.
・Pleated media filter
・Can be installed in semiconductor and electronic device manufacturing equipment
・Can handle low-concentration organic gases, acidic gases, and basic gases
・Special structure with high loading of activated carbon and ion exchanger between sheets
Tools
FFU
Frame Material
aluminum
Stainless steel
Sizing in mm
610ｘ610ｘ80D,100D,147D
610ｘ900ｘ80D,100D,147D
305ｘ610ｘ80D,100D,147D
400ｘ610ｘ80D,100D,147D
250ｘ450ｘ80D,100D,147D
Custom Sizing Possible
Compatible Gasses
| Gaz | Material | Problem |
| Condensable Volatiles |
TMS, IPA, PGMEA, TOLUENE, N-DECANE, HMDS | Contamination of wafers Contamination of lenses |
| Acids | SO2, H3PO4, CH3COOH | Corrosion of metal wiring Contamination of wafers Contamination of lenses |
| Bases Amine |
NH3, NMP, TMA, Morpholine | Contamination of wafers Contamination of lenses |