Sola Ciel Mat
Sola Ciel Mat is a chemical filtration filter in which an adsorbent is supported on a porous material using our proprietary manufacturing method. It can be easily installed in a fan filter unit (FFU) and is capable of removing organic gases, acid gases, and basic gases. It ensures high gas removal performance and is used in clean rooms in electronic equipment manufacturing factories such as semiconductor factories and liquid crystal factories.
・Filter with perforated media structure
・ Specifications suitable for fan filter units (FFU)
・ Low pressure loss and can handle organic gases, acidic gases, and basic gases
・ Can be stacked to suit the gas environment used
Tools
AHU FFU
Frame Material
aluminum
Stainless steel
Sized in mm
Face:305mm~1200mm
Thickness:40D, 60D, 80D, 100D
Custom Sizing Possible
Custom Sizing Possible
| Gaz | Material | Problem |
| Condensable Volatiles |
TMS, IPA, PGMEA, TOLUENE, N-DECANE, HMDS | Contamination of wafers Contamination of lenses |
| Acids | SO2, H3PO4, CH3COOH | Corrosion of metal wiring Contamination of wafers Contamination of lenses |
| Bases Amine |
NH3, NMP, TMA, Morpholine | Contamination of wafers Contamination of lenses |