Sola Ciel Mat

 

Sola Ciel Mat is a chemical filtration filter in which an adsorbent is supported on a porous material using our proprietary manufacturing method. It can be easily installed in a fan filter unit (FFU) and is capable of removing organic gases, acid gases, and basic gases. It ensures high gas removal performance and is used in clean rooms in electronic equipment manufacturing factories such as semiconductor factories and liquid crystal factories.

 

・Filter with perforated media structure

・ Specifications suitable for fan filter units (FFU)

・ Low pressure loss and can handle organic gases, acidic gases, and basic gases

・ Can be stacked to suit the gas environment used

Tools

AHU FFU

Frame Material

aluminum

Stainless steel

Sized in mm

Face:305mm~1200mm

Thickness:40D, 60D, 80D, 100D

Custom Sizing Possible

Custom Sizing Possible

Gaz Material Problem
Condensable
Volatiles
TMS, IPA, PGMEA, TOLUENE, N-DECANE, HMDS Contamination of wafers
Contamination of lenses
Acids SO2, H3PO4, CH3COOH Corrosion of metal wiring
Contamination of wafers
Contamination of lenses
Bases
Amine
NH3, NMP, TMA, Morpholine Contamination of wafers
Contamination of lenses