Sola Ciel Bee
Sola Ciel Bee is a chemical filter made by mixing and sintering activated carbon and ceramic. It is sintered with a high concentration of activated carbon using a unique manufacturing process, and is effective at removing organic gases and removing acidic gases by impregnating them with chemicals. It is used as an outside air intake filter in electronic equipment manufacturing factories.
・ Honeycomb structure media filter
・ Specifications suitable for outdoor air conditioners
・ Low pressure loss, low dust generation, and can handle organic and acidic gases
・ Special honeycomb structure with high content of activated carbon powder
Application:MAU
Frame material:Stainless steel
Sizing in mm:610x610x100D 610x305x100D Custom Sizing Possible
Compatible Gasses
| Gas | Material | Problem |
| Condensables Volatiles | TMS,IPA,PGMEA,Toluene,n-Decane,HMDS,HDMSO | Contamination of wafers Contamination of lenses |
| Acids | SO2,H3PO4,CH3COOH | Corrosion of metal wiring Contamination of wafers Contamination of lenses |